Low-Temperature MOCVD of Chromium Carbonitride Coatings from Tetrakis(diethylamido)chromium and Pyrolysis Mechanism of this Single-Source Precursor
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چکیده
Carbonitride Coatings from Tetrakis(diethylamido)chromium and Pyrolysis Mechanism of this Single-Source Precursor Francis Maury* and Franco Ossola Laboratoire de Réactivité et Protection des Matériaux, CNRS-INPT, Ecole Nationale Supérieure de Chimie, 118 route de Narbonne, 31077 Toulouse cedex 4, France Istituto di Chimica e Tecnologie Inorganiche e dei Materiali Avanzati, Area della Ricerca del CNR, Corso Stati Uniti 4, I-35127, Padova, Italy
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تاریخ انتشار 1998